Welcome!

APCSCRM 2023

尊敬的业内同仁,您好!

上海先普气体技术有限公司诚挚地邀请您参加11月8日-10日在中国北京·朗丽兹西山花园酒店举办的第四届亚太碳化硅及相关材料国际会议。

Distinguished delegates,

Shanghai Xianpu Gas Technology Co., Ltd.sincerely invites you to participate in APCSCRM 2023!

APCSCRM 2023 will be grandly held in PALACE GARDEN HOTEL & RESORTS Beijing, China, on November 08-10, 2023, for better accelerating the academic research, technological progress and industrial upgrading of silicon carbide and other wide bandgap semiconductor industries in the Asia-Pacific region.


关于上海先普气体技术有限公司

About Shanghai Xianpu Gas Technology Co., Ltd.

先普由归国留学人员江晓松博士于2004年在上海市创建,是国家级专精特新小巨人企业和上海市高新技术企业。

先普是一家为半导体芯片生产和集成电路制造配套的超高纯气体纯化设备及零件的厂商,早在2005年,先普在国内首先量产纯度为9N的气体纯化器,遥遥领先国内同行。

先普坚守“创造价值,服务产业”的公司使命,解决芯片供应链中的诸多“卡脖子”难题。

Founded in Shanghai in 2004 by Dr. Jiang Xiaosong, Xianpu is a state-level specialized and special new small giant enterprise and a high-tech enterprise in Shanghai.

Xianpu is a manufacturer of ultra-high purity gas purification equipment and parts for semiconductor chip production and integrated circuit manufacturing. As early as 2005, Xianpu first mass-produced gas purifiers with a purity of 9N in China, far ahead of domestic peers.

Xianpu adheres to the company mission of "creating value and serving the industry" and solves many difficult problems in the chip supply chain.


产品介绍

About Production

先普POU纯化器

Xianpu POU purifier

先普POU高性能气体纯化器采用的是常温催化剂技术,通过化学反应和物理吸附相结合的方法在常温下将工艺气体(进气纯度5N)中的H2O, O2, CO, CO2, H2, NMHC等杂质去除到1ppb以下(7NP系列为5ppb以下),并且在内表面电化学抛光的316L不锈钢罐体中内置了过滤精度为0.003微米的颗粒过滤器。

Xianpu POU high-performance gas purifier adopts room temperature catalyst technology, through a combination of chemical reaction and physical adsorption method to remove impurities such as H2O, O2, CO, CO2, H2, NMHC, etc. in the process gas (inlet purity 5N) to less than 1ppb at room temperature (less than 5ppb in 7NP series), and built-in particle filter of 0.003 microns precision on the inner surface of electrochemically polished 316L stainless steel canister. A particle filter with a filtration accuracy of 0.003 micron is built into the 316L stainless steel tank with an electrochemically polished inner surface.

先普Getter纯化器

Xianpu Getter purifier

先普G系列高性能气体纯化器采用的是吸气剂(Getter)技术,通过化学反应在高温下将工艺气体中的H2O, O2, CO, CO2, H2, NMHC, N2等杂质去除到1ppb以下(7NG系列为5ppb以下),并且内置了过滤精度为0.003微米的颗粒过滤器。

Xianpu G series high-performance gas purifiers remove impurities such as H2O, O2, CO, CO2, H2, NMHC, N2, etc. with Getter technology,from process gases to less than 1 ppb (5 ppb or less for the 7NG series) at high temperatures through a chemical reaction, and have a built-in particulate filter with a filtration accuracy of 0.003 microns.


先普气体过滤器

Xianpu gas filters

先普以多年来为客户提供气体纯化与过滤解决方案的经验,应国内半导体产业国产化需求,推出0.003微米高精度气体过滤器,覆盖流量范围从30slm到10000Nm3/h。

With years of experience in providing customers with gas purification and filtration solutions, and in response to the demand for localization in the domestic semiconductor industry, Xianpu has launched 0.003 micron high-precision gas filters, covering a flow range from 30slm to 10,000Nm3/h.


先普气体纯化设备

Xianpu gas purification equipment

采用化学反应与物理吸附相结合的方法,在常温下将工艺气体中的H2O, O2, CO, CO2, H2, NMHC等杂质去除到1ppb以下(7NS系列 / 7NG系列 / 7NK系列为5ppb以下),配置过滤精度为0.003微米的颗粒过滤器,流量最大可达20000Nm3/h。

With a combination of chemical reaction and physical adsorption, it removes impurities such as H2O, O2, CO, CO2, H2, NMHC, etc. in the process to less than 1 ppb (less than 5 ppb in 7NS / 7NG / 7NK series) at room temperature, equipped with particle filters with a filtration precision of 0.003 micron, and the flow rate can reach a maximum of 20,000 Nm3/h.


联系我们

Contact

Web:https://simpuretech.com/

Tel:400-900-2215

Mail:mail@simpuretech.com

Add

上海市闵行区中春路1288号17幢

Building 17, No. 1288 Zhongchun Road, Minhang District, Shanghai, China

ABOUT APCSCRM2023

组委会联系人/Contact:

Ms. Chen: (+86) 13155757628

Mr. Hou: (+86) 13811837211

Ms. liu: (+86) 18931699592

E-mail:apcscrm@iawbs.com



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