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APCSCRM 2023

尊敬的业内同仁，您好！

大连创锐光谱科技有限公司诚挚地邀请您参加11月8日-10日在中国北京·朗丽兹西山花园酒店举办的第四届亚太碳化硅及相关材料国际会议。

Distinguished delegates，

Chuangrui CO,. LTD. sincerely invite you to participate in APCSCRM 2023！

APCSCRM 2023 will be grandly held in PALACE GARDEN HOTEL & RESORTS Beijing, China, on November 08-10, 2023, for better accelerating the academic research, technological progress and industrial upgrading of silicon carbide and other wide bandgap semiconductor industries in the Asia-Pacific region.

关于创锐光谱

About Chuangrui CO,. LTD.

创锐光谱创立于2016年，基于自主技术，深耕科学仪器和半导体材料检测两大应用领域，已实现从基础研究到工业生产的全产业链赋能。公司主营产品打破进口垄断格局，已覆盖国内外科研机构和半导体材料企业。创锐光谱以底层光谱技术创新为核心立足点，科研产品与工业产品兼顾并重，形成“一核两翼”的发展方向，未来3年，公司将全面拓展泛半导体工业检测市场，致力于成为全球领先的半导体检测技术解决方案供应商。

Founded in 2016, Chuangrui has been focusing on two major application areas: scientific instruments and semiconductor material testing based on independent technology. The company has achieved full industry chain empowerment from basic research to industrial production. Its main products have broken the import monopoly situation and covered research institutions and semiconductor material enterprises both domestically and internationally. With the core technology of spectral innovation as its foothold, Chuangrui gives equal attention to scientific products and industrial products, forming a development direction of "one core and two wings". In the next three years, the company will fully expand the pan-semiconductor industrial testing market and strive to become the leading global supplier of semiconductor testing technology solutions.

产品介绍

About Production

碳化硅晶圆质量成像检测系统

Silicon Carbide Wafer Quality Imaging Detection System

创锐基于在超快瞬态吸收光谱领域的深厚技术积累，依托自主研发的高能、高频、高稳定性激光技术，创新性地开发了大面积高速相机成像检测方法和相关软件、算法系统通过对晶圆少子寿命长短和分布等物理性质的高速成像采集，实现了对SiC晶圆（4寸、6寸和8寸）的快速质量成像检测和分析。该设备技术指标可以达到100μm高精度空间分辨和15ns的超快时间分辨，可对晶圆体相中点缺陷浓度、缺陷分布进行快速、无损和非接触式检测。其整机自动化设备具备全面自动化晶圆转运、测试、数据处理和一键输出报告等优异功能。

Based on profound technical expertise in the field of ultra-fast transient absorption spectroscopy, and relying on independently developed high-energy, high-frequency, and high-stability laser technology, Chuang Rui has innovatively developed a large-area high-speed camera imaging detection method and related software and algorithms. By high-speed imaging acquisition of the physical properties such as the length and distribution of minority carriers in silicon wafers, it has achieved fast quality imaging detection and analysis of silicon carbide wafers (4-inch, 6-inch, and 8-inch). The technical indicators of this equipment can achieve a high-precision spatial resolution of 100 μm and an ultra-fast time resolution of 15 ns, enabling fast, non-destructive, and non-contact detection of point defect concentration and defect distribution in the wafer body phase. The fully automated equipment possesses excellent functions such as fully automated wafer transportation, testing, data processing, and one-click output reporting.

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